![]() ![]() 238000001514 detection method Methods 0.000 abstract description 20.VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 20. ![]() 229910052904 quartz Inorganic materials 0.000 claims description 20.238000004519 manufacturing process Methods 0.000 title claims description 5.Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.) Filing date Publication date Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp Priority to JP8330078A priority Critical patent/JPH10170272A/en Publication of JPH10170272A publication Critical patent/JPH10170272A/en Status Withdrawn legal-status Critical Current Links Original Assignee Seiko Epson Corp Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.) Inventor Masayuki Kikushima 正幸 菊島 Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.) Withdrawn Application number JP8330078A Other languages Japanese ( ja) Google Patents Piezoelectric gyro-sensor and its manufacture Google Patents JPH10170272A - Piezoelectric gyro-sensor and its manufacture JPH10170272A - Piezoelectric gyro-sensor and its manufacture ![]()
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